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Overview

Interdisciplinary overview of MST (MicroElectroMechanical Systems - MEMS). Transducer definition: Sensors and Actuators. Micromachining techniques including silicon bulk micromachining, silicon surface micromachining, stiction problems, bonding processes, LIGA technique, micromachined mould template and electroplating, sealed cavity formation, stereolithography, chemical mechanical polishing for planarisation, electric discharge micromachining, laser micromachining, focused ion beam micromachining. Properties of materials for micromachining. Mechanical transducers. Optical transducers.Thermal transducers. Magnetic transducers. Chemical and biological transducers. Microfluidic devices. Circuit interfaces to transducers. System considerations. Case studies. Technology trends.

Study Level

Postgraduate

Offering Terms

Term 1

Campus

Kensington

Indicative contact hours

3

Course Outline

To access course outline, please visit:

Fees

Pre-2019 Handbook Editions

Access past handbook editions (2018 and prior)

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